Overview
Wafer transfer robot for 300mm atmospheric environments.
Detailed specifications
Other10
- Extras
- {"arm_types":"SCARA, double-handled, single arm","wafer_size":"300mm","environments":"vacuum, atmospheric","special_features":"direct drive motor, power line communication, high-speed 650wph, selectable arm length, waterproof IP64"}
- Industries
- manufacturing
- Sub Category
- wafer_transfer_robot
- Datasheet Url
- View Link
- Specs Sources
- View Link
- Model Variants
- ACTRANS UT-VSW3000NS series,ACTRANS UT-VDX3000NS series,ACTRANS UT-VDW3000HS series,UTVW-R2800H,ACTRANS UT-VFX3000NM series,ACTRANS UT-AXW3000NS,ACTRANS UTM-R3700F,ACTRANS UT-AFX/W4000,ACTRANS UT-AFX/W3000NM,ACTRANS UTW-REH5500,ACTRANS UTX/W-RF5500RW
- Specs Source Pass
- phase_d_detect_enrich
- Availability Status
- available
- Countries Available
- Japan,Global
- Additional Information
- - Specialized for clean semiconductor fab environments (vacuum & atmospheric wafer transfer). - Double-arm vacuum models (UT-VSW3000NS, UT-VDW3000HS) offer high throughput and space savings. - UT-VDX3000NS uses direct drive motor for vibration reduction. - UT-VDW3000HS achieves 650 wph ultra-high-speed throughput. - UTX/W-RF5500RW is a waterproof model with IP64 rating for harsh cleanroom conditions. - Arm length and Z stroke selectable on UT-VFX3000NM series. - Product line includes wafer aligners and FPD transfer robots on related pages. - Virtual museum available at daihen-clean-robot.jp.
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