Overview
High-speed vacuum wafer robot up to 650 WPH for 300mm wafers.
Detailed specifications
Other5
- Specs Sources
- View Link
- Price On Request
- true
- Specs Source Pass
- phase_d_detect_enrich
- Availability Status
- available
- Additional Information
- - Part of Daihen's ACTRANS series of clean transfer robots for semiconductor manufacturing - Designed for 300mm wafer handling in vacuum environments - Double-hand type with SCARA arm for space saving in vacuum transfer areas - Daihen provides repair, inspection, and overhaul services to improve equipment uptime - The company has global sales and support locations for clean transfer robots - Related models include UT-VDX3000NS (single-arm, direct drive) and UT-VDW3000HS (high-speed double-arm, 650WPH) - The UT-VDW3000 series won the 'Machine Industry Design Award IDEA Japan Robot Industry Association Award' (2022) and 'Top Ten New Product Award Main Prize' (2022)
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