Overview
85kg Z-axis dual-arm vacuum robot for G6 flat-panel displays.
Detailed specifications
Other10
- Industries
- semiconductor,flat_panel_display,electronics
- Max Speed Ms
- 1.618
- Sub Category
- flat_panel_transport
- Specs Sources
- View Link
- Model Variants
- SPR-AD008BTN-154/035,SPR-AD008BWN-154/070,SPR-801R,SPR-804R,SPR-811R,SPR-8565,SPR-8566,SPR-8508R,SPR-8571,SPR-8572,SPR-8573
- Company Country
- JP
- Price On Request
- true
- Specs Source Pass
- phase_d_detect_enrich
- Availability Status
- available
- Additional Information
- - Made-to-order (受注生産品) - Double-arm vacuum robot with Z-axis for G6 (Gen6) flat panels - X-axis link arm type model - Has similar models SPR-8572 (X-axis slider type) and SPR-8573 (X-axis slider type with cooling mechanism) - Used in cleanroom environments for glass substrate transport
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