Overview
High-payload atmospheric robot for ≤300mm wafers with wide motion range.
Detailed specifications
Other12
- Extras
- {"note":"Product is an industrial cleanroom robot for semiconductor wafer handling, not an AMR/AGV. Category set closest as 'surgical-medical' per schema options since schema lacks 'cleanroom' or 'semiconductor' category; actual use is industrial cleanroom automation.","wafer_size":"300mm","environment_options":["vacuum","atmospheric","splash_proof_IP64"],"sub_category_actual":"cleanroom_wafer_transfer_robot","transfer_speed_max_wph":650}
- Sub Category
- cleanroom_transfer
- Datasheet Url
- View Link
- Specs Sources
- View Link
- Model Variants
- UT-VSW3000NS,UT-VDX3000NS,UT-VDW3000HS,UTVW-R2800H,UT-VFX3000NM,UT-AXW3000NS,UTM-R3700F,UT-AFX/W4000,UT-AFX/W3000NM,UTW-REH5500,UTX/W-RF5500RW
- Price On Request
- true
- Youtube Video Id
- PLzVgPpv3TSc7vSUMcl-GpJbDKGO05mX9A
- Specs Source Pass
- phase_d_detect_enrich
- Availability Status
- available
- Countries Available
- Japan,Global (via overseas offices)
- Additional Information
- - Designed for cleanroom environments (wafer transfer) - UT-VDW3000HS: claimed world fastest (650 WPH) vacuum transfer - UT-VDW3000 series won 'Machine Industry Design Award - Japan Robot Association Award' (2022) - UT-VDW3000 series won 'Top 10 New Products Award' (2022) - Supports 300mm wafers - Splash-proof model (IP64) available for specific environments - Direct drive motor technology for vibration reduction - Power line communication technology in standard atmospheric models - After-sales support: consultation, repair, inspection, overhaul services - Vacuum and atmospheric variants available - Multiple arm configurations: single arm, double arm, SCARA, articulated arm
- Service Network Density
- regional
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