Overview
35kg Z-axis dual-arm vacuum robot for G4.5 flat-panel displays.
Detailed specifications
Other9
- Industries
- semiconductor,flat_panel_display,electronics
- Sub Category
- vacuum_robot
- Specs Sources
- View Link
- Model Variants
- SPR-AD008BTN-154/035,SPR-AD008BWN-154/070,SPR-801R,SPR-804R,SPR-811R,SPR-8565,SPR-8566,SPR-8508R,SPR-8571,SPR-8572,SPR-8573
- Company Country
- JP
- Price On Request
- true
- Specs Source Pass
- phase_d_detect_enrich
- Availability Status
- available
- Additional Information
- - Made-to-order product (受注生産品) - Double arm design with Z-axis - Magnetic fluid seal enables high vacuum environment operation - Handles G4.5 flat panels - Part of Daihen's clean transfer robot lineup for wafer and flat panel handling
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