The ACTRANS UT-VDX3000NS シリーズ is a Industrial Arm developed by DAIHEN (Japan). Key specifications: arm class small payload, payload 1 kg, reach 850 mm, repeatability ±0.02 mm.
Robo Index
Strong evidence
4 of 10 signals present
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Weighted factors
average of the 4 scored · blanks don't count
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Overview
Direct-drive single-arm precision vacuum wafer robot for ≤300mm wafers.
Flagship features
- High-precision vacuum robot for single arm type
- Equipped with a direct drive motor to significantly reduce vibration
- Supports ultra-high vacuum environment by vacuum seal of can type
- Contributes to improved equipment throughput with θ axis of endless type
- Built-in controller contributes to miniaturization of equipment
- With wafer center misalignment correction function
Buyer decision signals
Viability
1000th production robotic welding system delivered to East Manufacturing
Availability
Specifications
Category: Industrial Arm- Arm class
- small payload
- Payload
- 1 kg
- Reach
- 850 mm
- Repeatability
- ±0.02 mm
- Weight
- 29 kg
- IP rating
- 10-7Pa
- Safety cert.
- ISO Class 1
- Industries
- semiconductor manufacturing, flat panel display manufacturing
Company profile
- Founded
- 1919
Detailed specifications
Other16
- Extras
- {"note":"Product is an industrial cleanroom robot for semiconductor wafer handling, not an AMR/AGV. Category set closest as 'surgical-medical' per schema options since schema lacks 'cleanroom' or 'semiconductor' category; actual use is industrial cleanroom automation.","wafer_size":"300mm","environment_options":["vacuum","atmospheric","splash_proof_IP64"],"sub_category_actual":"cleanroom_wafer_transfer_robot","transfer_speed_max_wph":650}
- Cleanliness
- ISO Class 1
- Environment
- {"humidity":"20-70%, No condensation","temperature":"5-40°C(Atomosphere side) / 5-80°C(Arm Unit)"}
- Sub Category
- cleanroom_transfer
- Datasheet Url
- View Link
- Max Speed M S
- 1.5
- Specs Sources
- View Link
- Model Variants
- UT-VSW3000NS,UT-VDX3000NS,UT-VDW3000HS,UTVW-R2800H,UT-VFX3000NM,UT-AXW3000NS,UTM-R3700F,UT-AFX/W4000,UT-AFX/W3000NM,UTW-REH5500,UTX/W-RF5500RW
- Company Country
- JP
- Price On Request
- true
- Youtube Video Id
- PLzVgPpv3TSc7vSUMcl-GpJbDKGO05mX9A
- Specs Source Pass
- phase_d_detect_enrich
- Availability Status
- available
- Countries Available
- Japan,Global (via overseas offices)
- Additional Information
- - High-precision vacuum robot for single arm type - Equipped with a direct drive motor to significantly reduce vibration - Supports ultra-high vacuum environment by vacuum seal of can type - Contributes to improved equipment throughput with θ axis of endless type - Built-in controller contributes to miniaturization of equipment - With wafer center misalignment correction function
- Service Network Density
- regional
Where to buy
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Company milestones
- Oct 2022Deployment1000th production robotic welding system delivered to East Manufacturing
- 2024MilestoneFABTECH Mexico showcase of new FD-V25 robot
- 2022MilestoneSPR-804R listed in clean transfer robots catalog
- 2022LaunchUT-VDX3000NS introduced as a high-precision, low-vibration vacuum wafer robot
- 2022MilestoneVacuum wafer robot lineup expanded
- 2022AwardDAIHEN robot received IDEA/robot industry award mention
- 2022MilestoneSPR-804R product listing published
- 1991LaunchSynchro motion control system
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Frequently asked questions
- Who makes the ACTRANS UT-VDX3000NS シリーズ?
- The ACTRANS UT-VDX3000NS シリーズ is developed by DAIHEN, based in Japan.
- What type of robot is the ACTRANS UT-VDX3000NS シリーズ?
- The ACTRANS UT-VDX3000NS シリーズ is a Industrial Arm made by DAIHEN.
- How much does the ACTRANS UT-VDX3000NS シリーズ cost?
- Pricing for the ACTRANS UT-VDX3000NS シリーズ is not publicly listed — contact DAIHEN for a quote.
- What are the key specifications of the ACTRANS UT-VDX3000NS シリーズ?
- Key specifications of the ACTRANS UT-VDX3000NS シリーズ: arm class small payload, payload 1 kg, reach 850 mm, repeatability ±0.02 mm, weight 29 kg.
Reviews for ACTRANS UT-VDX3000NS シリーズ
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