Overview
3kg single-arm vacuum robot for G2 flat-panel displays.
Detailed specifications
Other9
- Industries
- semiconductor,flat_panel_display,electronics
- Sub Category
- fpd_transport_robot
- Specs Sources
- View Link
- Model Variants
- SPR-AD008BTN-154/035,SPR-AD008BWN-154/070,SPR-801R,SPR-804R,SPR-811R,SPR-8565,SPR-8566,SPR-8508R,SPR-8571,SPR-8572,SPR-8573
- Company Country
- JP
- Price On Request
- true
- Specs Source Pass
- phase_d_detect_enrich
- Availability Status
- available
- Additional Information
- - This robot is NOT a cleaning robot; it is an industrial FPD/PLP transport robot for cleanroom manufacturing. - Designed for G2-G3 generation glass panels and PLP (Panel Level Package) advanced post-processing. - High vacuum compatibility (10^-6 Pa) for vacuum chamber use. - Cleanliness rating: ISO Class 4 (per ISO-14644). - The product has received the IDEA Mechanical Design Award and Japan Robot Association Award. - Part of Daihen's ACTRANS series of clean transport robots.
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